Journal article
Self-matching plasma sources using 2.45 GHz solid-state generators: microwave design and operating performance
- Latrasse, Louis Sairem SAS, Neyron, France
- Radoiu, Marilena ORCID Sairem SAS, Neyron, France
- Nelis, Thomas Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Biel-Bienne, Switzerland
- Antonin, Olivier ORCID Institute for Applied Laser, Photonics and Surface Technologies, Bern University of Applied Sciences, Biel-Bienne, Switzerland
- 2017-11-3
Published in:
- Journal of Microwave Power and Electromagnetic Energy. - Informa UK Limited. - 2017, vol. 51, no. 4, p. 237-258
- Language
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- English
- Open access status
- closed
- Identifiers
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- DOI 10.1080/08327823.2017.1388338
- ISSN 0832-7823
- Persistent URL
- https://sonar.rero.ch/global/documents/63319
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