Journal article
Microfabrication of Piezoelectric MEMS
- BABOROWSKI, JACEK a Ceramics Laboratory Engineering Faculty Swiss Federal Institute of Technology EPFL , Lausanne, Switzerland
- 2010-8-12
Published in:
- Integrated Ferroelectrics. - Informa UK Limited. - 2004, vol. 66, no. 1, p. 3-17
Control and Systems Engineering
Electrical and Electronic Engineering
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Ceramics and Composites
- Language
-
- English
- Open access status
- closed
- Identifiers
-
- DOI 10.1080/10584580490894302
- ISSN 1058-4587
- Persistent URL
- https://sonar.rero.ch/global/documents/120993
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